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The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL

Khi, Khim Beh and Fahmi, Samsuri and Tze, Pin Lee and Khairudin, Mohamed (2016) The Fabrication of PDMS mould for Microelectrode Array Biochip using NIL. In: IOP Conference Series: Materials Science and Engineering, 2nd International Manufacturing Engineering Conference and 3rd Asia-Pacific Conference on Manufacturing Systems (iMEC-APCOMS 2015), 12-14 November 2015 , Kuala Lumpur, Malaysia. pp. 1-11., 114 (213001). ISSN 1757-8981 (Print), 1757-899X (Online)

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Abstract

In recent years, low-cost micro and nano fabrication process have gain intention from the manufacturing industry. Biochip is a platform of miniaturized microarrays arranged on a solid substrate that allows various biological tests to achieve immediate results. The development of biochip has established a new platform in biomedical industry. However, to fulfill the demands and availability in the market with affordable cost requires high volume manufacturing techniques for the fabrication of the biochips. In this article we will discuss the fabrication of PDMS mould for replicating microelectrode array of biochip. The fabrication of the microelectrodes utilizes the Nanoimprint lithography (NIL) technique. Finally, the fabrication of PDMS mould has been demonstrated successfully for using Nanoimprint lithography (NIL) technique and achieved 13 % of size difference in overall.

Item Type: Conference or Workshop Item (Lecture)
Uncontrolled Keywords: NIL; PDMS; PET
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Faculty/Division: Faculty of Electrical & Electronic Engineering
Depositing User: Mrs. Neng Sury Sulaiman
Date Deposited: 15 Apr 2016 03:42
Last Modified: 16 May 2018 07:44
URI: http://umpir.ump.edu.my/id/eprint/12857
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