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Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study

Narayanamurthy, Vigneswaran and Lakshminarayanan, Sujatha and Yacin, S. Mohamed and Fahmi, Samsuri (2017) Design Optimization and Analysis of Proof Mass Actuation for MEMS Accelerometer: A Simulation Study. Journal of Circuits, Systems and Computers, 26 (6). pp. 1-10. ISSN 0218-1266 (print); 1793-6454 (online)

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In this paper, we present the design and analysis of the proof mass for capacitive based MEMS accelerometers. A study was done to determine the parameters (length of hinge and number of combs) to be optimized for the MEMS accelerometer design. The proposed design can measure the acceleration in xx-, yy- and zz-axes. The design features a proof mass with interdigitated fingers along each side. These interdigitated fingers act as parallel plate capacitors. Due to acceleration, capacitance changes along the comb drive. This change in capacitance can be used to monitor the acceleration. Analysis has been carried out with different comb width designs. Using the MEMS CAD tool CoventorWare, the structure has been designed, simulated and analyzed. The process flow for the fabrication has also been proposed for the above structure. Comparative study with several designs has been made and the efficient design parameters to be considered while designing MEMS accelerometer were proposed. Based on the study, a set of optimized design parameters for the comb accelerometer were reported.

Item Type: Article
Uncontrolled Keywords: MEMS; accelerometer; proof mass; comb-structure; CoventorWare; simulation; capacitive; hinge; optimization
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Faculty/Division: Faculty of Electrical & Electronic Engineering
Depositing User: Noorul Farina Arifin
Date Deposited: 08 Mar 2017 00:32
Last Modified: 16 May 2018 07:51
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