Beh, Khi Khim and Fahmi, Samsuri and Lee, Lai Seng and Ooi, Su Guan and Ong, Wei Jie and Khairudin, Mohamed (2017) The fabrication of microelectrode array biochip on PET using plate-to-plate NIL. In: AIP Conference Proceedings, 3rd International Conference of Global Network for Innovative Technology 2016: Advanced Materials for Innovative Technologies (IGNITE 2016) , 27-29 January 2016 , Penang, Malaysia. pp. 1-2., 1865 (070001). ISSN 0094-243X ISBN 9780735415454
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Abstract
Polyethylene terephthalate (PET) films are useful for various applications due to the characterization of PET were flexibility, thermal resistance and chemical resistant. PET Films are widely used in both commercial and industrial today since they are highly demand in the market. In this study, microelectrode array biochip was fabricated on flexible PET film using (plate-to-plate) nanoimprint lithography (NIL). The PET films acted as substrate while PDMS as the mould. The Polydimethylsiloxane (PDMS) mould was attached on top of the PET film and additionally clamped between two pieces of glass. A mild force was applied to it for REM (replica moulding). A study was carried out upon the surface profiling of the PDMS mould and PET to monitor the possibility of deformation after applying force upon the samples. The experiment shall present the finding of required force to REM the microelectrode array biochip pattern on the PET film.
| Item Type: | Conference or Workshop Item (Lecture) |
|---|---|
| Additional Information: | Indexed by Scopus |
| Uncontrolled Keywords: | NIL; PDMS; PET |
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Faculty/Division: | Faculty of Electrical & Electronic Engineering Institute of Postgraduate Studies |
| Depositing User: | Mrs Norsaini Abdul Samat |
| Date Deposited: | 20 Nov 2020 01:11 |
| Last Modified: | 20 Nov 2020 01:11 |
| URI: | http://umpir.ump.edu.my/id/eprint/29622 |
| Download Statistic: | View Download Statistics |
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