Samsuri, Fahmi B. (2013) Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application. (Unpublished)
|
Pdf
Process development of the device using in-house plate-to-plate tool with nanoimprint lithography technique for biochip application.pdf Download (1MB) | Preview |
Abstract
Biochip is a promising device with capabilities of performing sorting, trapping and screening a large number of biological samples in a short time. Fabrication of biochip pattern process leads to an opening study towards the development of a working biochip. The traditional photolithography process have a limitation in achieving high throughput for biochip pattem fabrication. In this research, the fab1ication process of biochip pattern was developed and the imprint parameter for biochip pattern using an in-house assembled plate-to-plate tool was investigated. The biochip pattems are prepared from existing projection lithography to create the mold. Using soft lithography technique, the biochip pattem was replicated invertly in the PDMS mold.
| Item Type: | Research Book Profile |
|---|---|
| Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
| Faculty/Division: | Faculty of Electrical & Electronic Engineering |
| Depositing User: | En. Mohd Ariffin Abdul Aziz |
| Date Deposited: | 04 Jan 2023 03:47 |
| Last Modified: | 04 Jan 2023 03:47 |
| URI: | http://umpir.ump.edu.my/id/eprint/36267 |
| Download Statistic: | View Download Statistics |
Actions (login required)
 |
View Item |