Lee, Helen May Shian and Ismayuzri, Ishak and Mohd Zairulnizam, Mohd Zawawi (2023) Rapid Fabrication of Glass Micro and Nanostructures via Laser-assisted Hot Embossing. JLMN-Journal of Laser Micro/Nanoengineering, 18 (1). pp. 1-7. ISSN 1880-0688. (Published)
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Abstract
The escalating demand for glass that exhibits various surface functions has encouraged efforts to develop more efficient and economical micro-/nano-patterning of glass substrates. We propose rapid hot embossing of glass micro-/nanostructures using an infrared transmissive mold assisted by CO2 laser irradiation. This resistless, etch-free technique utilizes the synergy of the silicon mold’s high transmittance and strong optical absorption of the glass at a 10.6-μm wavelength. Furthermore, this non-isothermal process requires preheating of the glass temperature below the glass transformation point (Tg) of the glass, eliminating the soaking time, and using a short contact pressing time and a lower pressing load to produce high-resolution space patterns. The method is capable of instantaneous high-resolution replication of various grating patterns from the nano- to microscale with a single laser scan. By controlling the scanning speed and ensuring sufficient pressure and heating depth on the glass surface, 250-nm to 50-μm line- widths and space patterns were embossed in a few seconds with excellent replication fidelity. The laser-assisted hot embossing methods developed in this study facil-itated high-throughput, energy-efficient, reproducible, and highly accurate micro-/nano-patterning of glass surfaces.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | laser-assisted, micro/nanostructures, hot embossing, optical glass, energy-efficient |
| Subjects: | T Technology > TS Manufactures |
| Faculty/Division: | Institute of Postgraduate Studies Faculty of Manufacturing and Mechatronic Engineering Technology |
| Depositing User: | Noorul Farina Arifin |
| Date Deposited: | 10 Feb 2023 08:43 |
| Last Modified: | 10 Feb 2023 08:43 |
| URI: | http://umpir.ump.edu.my/id/eprint/36973 |
| Download Statistic: | View Download Statistics |
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