UMP Institutional Repository

Thermal response of silicon during virtual laser micromachining

Muhammad Hasri, Ibrahim (2009) Thermal response of silicon during virtual laser micromachining. EngD thesis, Universiti Malaysia Pahang.

[img]
Preview
PDF (Table of content)
Thermal response of silicon during virtual laser micromachining - table of content.pdf - Accepted Version

Download (58kB) | Preview
[img]
Preview
PDF (Abstract)
Thermal response of silicon during virtual laser micromachining - abstract.pdf - Accepted Version

Download (8kB) | Preview
[img]
Preview
PDF (Chapter 1)
Thermal response of silicon during virtual laser micromachining - chapter 1.pdf - Accepted Version

Download (14kB) | Preview
[img]
Preview
PDF (References)
Thermal response of silicon during virtual laser micromachining - references.pdf - Accepted Version

Download (13kB) | Preview

Abstract

This project presents thermal response of silicon during virtual laser micromachining based on finite element method. Predictable models were developed using ALGOR FE code to simulate laser micromachining and to predict temperature distribution in silicon due to laser material interaction. Two FE models, linear and circular cutting were developed. Thermal properties of silicon were taken from literature. Time dependent heat flux was defined at each node along cutting line, laser velocity was designed by model distance and time interval. Transient heat transfer analysis was used to simulate laser micromachining. Process parameters considered were laser power, velocity and plasma gas effect. Total of 28 simulations were done. The FE model was validated from published report. Results qualitatively were found to be agreeable. Crucial factors are found to be pulse energy and moving velocity in reducing thermal cracks and thermal debris. This virtual work can significantly reduce the cost and time for process development in industry, and improve product reliability.

Item Type: Thesis (EngD)
Additional Information: Project paper (Bachelor of Mechanical Engineering) -- Universiti Malaysia Pahang - 2009, SV : Dr. Daw Thet Thet Mon
Uncontrolled Keywords: Micromachining; Heat; Transmission
Subjects: T Technology > TJ Mechanical engineering and machinery
Faculty/Division: Faculty of Mechanical Engineering
Depositing User: Ms. Nor Suhadah Sabli
Date Deposited: 07 Mar 2017 03:29
Last Modified: 07 Mar 2017 03:29
URI: http://umpir.ump.edu.my/id/eprint/16988
Download Statistic: View Download Statistics

Actions (login required)

View Item View Item