Lee, Helen and Syarifah Nur Hasanah, Syed Kamarudin and Ismayuzri, Ishak and Ahmad Rosli, Abdul Manaf and Ahmad Shahir, Jamaludin and Mohd Ali Hanafiah, Shaharudin and Mohd Zairulnizam, Mohd Zawawi (2021) Feasibility Study of Wafer Scale Laser Assisted Thermal Imprinting of Glass Nanostructures. In: Recent Trends in Manufacturing and Materials Towards Industry 4.0: Selected Articles from iM3F 2020, Malaysia , 6 August 2020 , Virtually hosted by Universiti Malaysia Pahang. pp. 917-923.. ISBN 978-981-15-9505-9
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Abstract
Major challenges for any direct nanostructuring method on glass substrate is the difficulty to scale up the patterning area to industrial scale. In this work, a rapid and large area direct thermal imprinting of glass nanostructures using silicon mold assisted by CO2 laser irradiation was demonstrated. Pattern transfer was successful for experiment trial of one spot laser irradiation and laser scanning with imprinting area of 100 mm2 and 400 mm2; confirmed by SEM and AFM measurement. When the method was extended to a larger imprinting area (2000 mm2), the glass was cracked and partially imprinted due to the high cooling rate of the glass after laser irradiation and misalignment of the glass during the contact pressing step in our molding setup.
| Item Type: | Conference or Workshop Item (Lecture) |
|---|---|
| Uncontrolled Keywords: | CO2 laser, Thermal imprinting, Optical glass, Nanostructures |
| Subjects: | T Technology > TS Manufactures |
| Faculty/Division: | Institute of Postgraduate Studies Faculty of Manufacturing and Mechatronic Engineering Technology |
| Depositing User: | Noorul Farina Arifin |
| Date Deposited: | 13 Feb 2023 02:35 |
| Last Modified: | 13 Feb 2023 02:35 |
| URI: | http://umpir.ump.edu.my/id/eprint/36984 |
| Download Statistic: | View Download Statistics |
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