Items where Author is "Taniguchi, Jun"

Article

Nurhafizah, Abu Talip and Hayashi, Tatsuya and Taniguchi, Jun and Hiwasa, Shin (2015) Lifetime Amelioration of Antireflection Structure Molds by Means of Partial-filling Ultraviolet Nanoimprint Lithography. Microelectronic Engineering, 141. pp. 81-86. ISSN 0167-9317. (Published)

Nurhafizah, Abu Talip and Hayashi, Tatsuya and Taniguchi, Jun and Hiwasa, Shin (2015) Lifetime Amelioration of Release-Agent-Free Antireflection-Structured Replica Molds by Partial-Filling Ultraviolet Nanoimprint Lithography. Japanese Journal of Applied Physics, 54 (6S1). pp. 1-7. ISSN 0021-4922. (Published)

Conference or Workshop Item

Nurhafizah, Abu Talip and Hayashi, Tatsuya and Taniguchi, Jun and Hiwasa, Shin (2015) Lifetime Prolongation of Release Agent on Antireflection Structure Molds by Means of Partialfilling Ultraviolet Nanoimprint Lithography. In: ICEP-IAAC 2015 Proceedings : International Conference on Electronics Packaging and iMAPS All Asia Conference , 14-17 April 2015 , Kyoto, Japan. pp. 418-421.. (Published)