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Article
Nurhafizah, Abu Talip and Hayashi, Tatsuya and Taniguchi, Jun and Hiwasa, Shin (2015) Lifetime Amelioration of Antireflection Structure Molds by Means of Partial-filling Ultraviolet Nanoimprint Lithography. Microelectronic Engineering, 141. pp. 81-86. ISSN 0167-9317. (Published)
Nurhafizah, Abu Talip and Hayashi, Tatsuya and Taniguchi, Jun and Hiwasa, Shin (2015) Lifetime Amelioration of Release-Agent-Free Antireflection-Structured Replica Molds by Partial-Filling Ultraviolet Nanoimprint Lithography. Japanese Journal of Applied Physics, 54 (6S1). pp. 1-7. ISSN 0021-4922. (Published)
Conference or Workshop Item
Nurhafizah, Abu Talip and Hayashi, Tatsuya and Tanighuchi, Jun and Hiwasa, Shin (2015) Lifetime Prolongation of Release Agent on Antireflection Structure Molds by Means of Partial-filling Ultraviolet Nanoimprint Lithography. In: Proceedings of the International Conference on Electronic Packaging and iMAPS All Asia Conference (ICEP-IACC 2015) , 14-17 April 2015 , Kyoto, Japan. pp. 418-421.. (Published)
Nurhafizah, Abu Talip and Hayashi, Tatsuya and Taniguchi, Jun and Hiwasa, Shin (2015) Lifetime Prolongation of Release Agent on Antireflection Structure Molds by Means of Partialfilling Ultraviolet Nanoimprint Lithography. In: ICEP-IAAC 2015 Proceedings : International Conference on Electronics Packaging and iMAPS All Asia Conference , 14-17 April 2015 , Kyoto, Japan. pp. 418-421.. (Published)