Design of Electrostatic Comb Actuators based on Finite Element Method

Mon, Thet Thet and Z., Ghazalli and Asnul Hadi, Ahmad and Mohd Fazli, Ismail and Khairul Fikri, Muhammad (2010) Design of Electrostatic Comb Actuators based on Finite Element Method. In: International Conference on Enabling Science and Nanotechnology (ESciNano 2010) , 1-3 December 2010 , Kuala Lumpur. pp. 1-3..

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Abstract

Electrostatic comb actuators are commonly used to provide displacement-invariant force in micro electro-mechanical system (MEMS). Major application can be found in resonator, inertial sensor, accelerometer, and gyroscope. The size of the comb may be a few microns to millimeters. Principally, the electrostatic force is produced in the comb structure due to potential difference between the electrodes, which is used to actuate the system attached to it. The higher forces are very often desirable for high sensitivity and performance. However to meet this demand, micro-scaled structures are very often fabricated on trial-error basis because of lack of well established fabrication method. In this situation, designing on a computer prior to the actual fabrication would be very helpful. Moreover, in a virtual device, parameters can be changed much more quickly than trial-and-error fabrication reducing the time to market and also the cost to develop a commercial device considerably. The aim of this paper is to present finite element modeling and analysis to design comb structure, and its limitation for realistic design. Design objective is to achieve higher actuation force. Since a computational model for design analysis at micro-scale based on FEM is never obsolete, this work will be useful for those who seek designing MEMS components in FEM as well as facilitate the MEMS industry to economically obtain feasible design parameters for micro-scaled devices.

Item Type:	Conference or Workshop Item (Lecture)
Uncontrolled Keywords:	electrostatic actuators; finite element analysis; micromechanical devices
Subjects:	T Technology > T Technology (General) T Technology > TJ Mechanical engineering and machinery
Faculty/Division:	Faculty of Mechanical Engineering
Depositing User:	Dr. Zakri Ghazalli
Date Deposited:	01 Oct 2015 04:05
Last Modified:	16 May 2018 04:09
URI:	http://umpir.ump.edu.my/id/eprint/10463
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